types of excimer lasers
Different types of excimer lasers typically emit at wavelengths between 157 and 351 nm:
| Excimer | Wavelength |
|---|---|
| F2 (fluorine) | 157 nm |
| ArF (argon fluoride) | 193 nm |
| KrF (krypton fluoride) | 248 nm |
| XeBr (xenon bromide) | 282 nm |
| XeCl (xenon chloride) | 308 nm |
| XeF (xenon fluoride) | 351 nm |
Typical excimer lasers emit pulses with a repetition rate up to a few kilohertz and average output powers between a few watts and hundreds of watts, which makes them the most powerful laser sources in the ultraviolet region, particularly for wavelengths below 300 nm. The power efficiency varies between 0.2 and 2%.
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